Abstract | Keywords | Export | Availability | Bookmark

Choose an application

• Reference Manager
• EndNote
• RefWorks (Direct export to RefWorks)

Secondary ion mass spectrometry (SIMS) is a mass spectrometric technique for solid materials that can provide elemental analysis at parts per million sensitivity and lateral resolution of 50 nm. When those capabilities are combined with the ability to provide that analysis as a function of depth, SIMS has proved to be a valued technique for a wide range of applications. This book was written to explain a technique that requires an understanding of many details in order to properly obtain and interpret the data. It also will serve as a reference for those who need to provide SIMS data. The book has over 200 figures and the references allow one to trace the development of SIMS and help understand the technique.

Secondary ion mass spectrometry. --- SIMS (Spectrum analysis) --- Mass spectrometry --- depth profiling --- magnetic sector mass analyzer --- mass spectrometry --- secondary ion mass spectrometry --- time-of-flight mass analyzer --- quadrupole mass analyzer